High vacuum magnetron sputtering coating system

1. magnetron sputtering principle:

Magnetron sputtering is a more commonly used physical deposition method. Magnetron sputtering in a vacuum chamber, the use of low-pressure gas discharge phenomenon, so that ions in the plasma bombard the target surface state, and a ring-shaped magnetic field to control a glow discharge, so that sputtered particles are deposited on a substrate. Magnetron sputtering can be easily coated film made of high melting point substance layer, on a large area can be made uniform plated film. 

2. magnetron sputtering process:

In the coating process, the selection process has an important effect on the properties of the films, according to the principle of magnetron sputtering technique, combined with the practical application of the device, the requirements of the film thickness in the range of magnitude of nm ~ μm, a thickness of <550nm, e.g. there are light interference effects, are the film category, usually called optical film technology.

3. magnetron sputtering characteristics: high sputtering rate, high deposition rate. Target sputtering source with a strong DIY select combinations.

Magnetron sputtering cathode source is an ideal controlled source, the thickness of the deposited film sputtering source of power or discharge current has a good linear correlation, so there is a good controllability, can better mass production consistency and repeatability. Sputter source can ideally placed in a vacuum chamber for a long time stability, access to pure film, vacuum coating to improve the adhesion of the film to ensure quality.

4. Get a high vacuum magnetron sputtering:

Vacuum is the absence of a state space of any substance, is a physical phenomenon. In the "vacuum", the sound can not be delivered because there is no media, but the transfer was not affected by electromagnetic vacuum. In fact, in the vacuum technology, the vacuum for the gas concerned, in general, to obtain a high vacuum by an oil diffusion pump, an oil diffusion pump capable of obtaining a higher degree of vacuum than the mechanical pump

Copper Plating-Magnetron Sputtering Vacuum Coating Equipments

 Nowadays, PVD Vacuum Coating Equipments is more and more used in the metal plating field. such as copper plating and steel plating field.
  In the electroless plating, electroless copper plating is very important. With the development of the electronics industry, in particular the demand for rapid development of computer, electronic communication equipment, and household appliances, double-sided and multi-layer printed circuit board is great.
  The PCB hole metal from the complex requirements of electrical conductivity, weldability, coating toughness and economy, the non-copper perfectly. Further other non-metallic materials (such as plastic, ceramic, etc.), electroless copper plating applications also very wide. In the future, the aspect of non-metallic materials, metal, copper plating the amount of about 90%. Currently, the LSI chip production, instead of aluminum interconnects using electroless copper wiring width of less than 90nm.
  Electroless copper plating solution from stability can be divided into low and high stability of electroless copper electroless copper stability; from the deposition rate to points, can be divided into low speed and high speed copper plating rate. The former deposition rate is generally 2μm / h ~ 4μm / h; the latter is generally 10μm / h.
  High speed copper plating is generally used for semi-additive method or full-additive method directly thick steel plating, has been the rapid development of high temperature and low-temperature high-speed craft.
  In recent years there has been differential copper plating method, namely through the pore walls of the PCB copper layer thickness is about the complex chemistry of the copper layer on the copper layer thickness finished school three times to 5 times, not only reduces the metallic copper consumption, but also reduce the cost, called the fourth milestone in the history of copper plating.
  Electroless copper plating solution generally consists of copper, complexing agents, reducing and stabilizing agent.

Tool&Die Ion Coater

 

 This sort of coater is designed for hard and super hard protective coatings on tools, cutter and mould. The vacuum sealing of chamber and the interior design and material of moving parts are under consideration of high-temperature bear, assembling high efficiency roundness arc evaporation source or rectangular flat arc evaporation source. We can also install hollow cathode gun and impact resistance bias power supply, to ensure the density and reactivity of plasma, increase the compactness and adhesion of coatings. Substrates can be three-dimensional motion, to enhance the uniform of coating. The full automatic control processing is steady and perfect. It can deposit  TiN,TiC,TiCN,TiAlCN,TiCrN,TiCrCN,TiAlCrN, multilayer super hard coatings, which is used in precision mould industry(dies, shear mould, standard mould and moulding mould etc), tool industry(drill, hard alloy, milling cutter, broaches, screw tap and gear cutter ect .) and automobile industry(piston, piston rings and alloy wheels etc

Film thickness of vacuum coating machine measuring and monitoring method

   

  Coating control method is the most direct method of quartz crystal micro balances (QCM design),the instrument evaporation source of  vacu​um coating machine can be directly driven by the PID control loop drive baffle and the rate of evaporation. As long as the instrument and system control software, it can control the whole process of coating. Coating machine (QCM design) accuracy is limited, however, partly because of its monitoring instead of the optical thickness of the coating quality. In addition, although the QCM design is very stable at low temperature, the temperature is high,so it would be very sensitive to temperature. After a long period of heating process, it is hard to avoid sensors for sensitive areas and lead to significant errors film.
  Optical monitoring is a kind of high precision coating optimization control mode, the vacuum coating machine can accurately control the thickness of the membrane (if used properly). The improvement of accuracy, due to many factors, but the most fundamental reason is the monitoring of optical thickness. Optimalswa - I - 05 single wavelength optical monitoring system, coating machine is indirect control, advanced optical monitoring software in combination with the development of Dr Wong, effectively improve the sensitivity and change the light reaction of film thickness to reduce the ultimate method of error theory, provides monitoring wavelength feedback or the choice of transfer mode and extensive. Especially suitable for coating a variety of thin film thickness monitoring including irregular membrane.