PVD Vacuum Coating Deposition-Thermal Evaporation Coating Equipments

PVD Vacuum Coating Deposition-Thermal Evaporation Coating Equipments

PVD vacuum coating deposition techniques have magnetron sputtering, cathodic arc ion plating, reactive ion plating reaction. Because gas turbine blade in working condition thermal shock, corrosion coating and thermal structure of the force between the blade base is very important. Usually in order to improve the bonding strength of the coating and the substrate, prior to deposition of the multi-leaf is preheated, heat-treated after deposition. Heating temperature control at about 950 ℃, heating time around 2h. Cathodic arc ion plating deposition MCrAIY hot corrosion coating on a gas turbine blade coating machine level, target tubular MCrAIY alloys. Post-deposition heat treatment, a long production cycle. There is also a small arc source arc ion plating after adding high-temperature diffusion, and achieved certain results.
An arc Ion vacuum coating equipment - plating process can be achieved combining step, both the diffusion layer can be obtained, they can obtain a dense thermal corrosion properties of the vacuum coating. Process is as follows:
Ion - plating. Leaf base - Ni-base alloy CH220; infiltration - Plating - using CoCrAITaY target.
(1) alloying. Bias: 850 ~ 1000V; temperature: about 920 ℃, with photoelectric pyrometer temperature; holding time: 20min.
(2) obtain deposits. Bias voltage: 200V, 250V, 300V; Temperature: were 600 ℃, 700 ℃, 800 ℃; deposition time: 150min.
Arc Ion - plating deposition coating 30μm CoCrAITaY the time of 3h, and the total time of magnetron sputtering coating 50μm for 8h. Wherein a considerable amount of time to preheat and post-processing.