Arc ion vacuum coating machine coating device

                   

Vacuum coating machine multi-arc ion plating equipment, cold cathode vacuum arc discharge as a principle of multi-arc ion plating technique, as film-forming fast, low energy consumption; precise control of film thickness, composition ratio, etc., have become PVD one of the main deposition method art.

Obtained in the preparation of domestic and superhard film and decorative film in wide range of applications, coating device specification more arc evaporation source to the destination number is concerned, there are three sources, six sources of the source 4, 8 a source, the source 10, source 12, 16 sources, all sources 20, 26 sources, ......, 54 sources; in terms of the size of the vacuum chamber, there ф800mm x 800mm, ф1000mm x lOOOmm, ф1000mm x 1500mm.ф1250mm x 1800mm.ф1810mm x 3500mm.ф2200mm x 5000mm and so on

Below 1250mm x 2500mm x (0.6 ~ 2.5) mm steel plate as the base prepared from large decorative film coating machine, for example, tell us about the structural characteristics of multi-arc ion plating equipment, working principle and operating procedures.

Coating device structure which is made part of the vacuum coating chamber, vacuum systems, pneumatic systems, electrical systems and other components. Annular region where the coating chamber is formed by a combination of inside and outside the cylinder through the superstructure and chassis made of. Indoor include revolves workpiece turret, an infrared heater heating the steel sheet, and 36 arc evaporation source distribution in the radial simplified. Is the number of arc evaporation source according to the cylinder diameter and height, and the uniformity of the film thickness of the gap and the spiral lines arranged. In order to prevent the upper and lower ends of the plated steel produce color on the upper and lower ends of the arc evaporation source were smaller pitch and tilt adjustments. Accordingly, the number of inside and outside the arc evaporation source 16 were simplified and 20.

Our research and development of multi-arc ion coating machine, also known as arc ion coating machine is an efficient, non-polluting ion vacuum coating machine, with deposition speed, ionization rate, ion energy, the equipment is simple, low cost, production large advantages. Arc ion plating is widely used tool, die superhard coatings, automobile wheels, golf equipment, watches, hotel supplies, sanitary ware, lamps, glasses frames, metal products, ceramics, and glass and other decorative coatings and other fields . Our efforts to improve the circular arc evaporation source, while efforts to develop high-performance flat rectangular arc evaporation source, are already equipped with the new machine.