Relatively mature PVD methods mainly include many arc and magnetron sputtering plating in two ways. Many arc plating equipment simple structure, easy to operate. The ion source by electric welding machine power supply can work, its process is similar to electric welding arc, specifically, to a certain process under pressure, arc needle contact with evaporation ion source is short, disconnect, make the gas discharge. Due to the cause of arc coating is mainly by means of moving arc spot, the evaporation source for formation of molten pool on the surface, make the metal evaporated, the film layer is deposited on the substrate, compared with the magnetron sputtering, it not only has the target material utilization rate is high, high ionization rate, more metal ions film the advantages of strong adhesion. In addition, many arc plating coating color is relatively stable, especially when doing the TiN coating, each batch are easy to get the same stability of golden, the magnetron sputtering method. Arc plating deficiency is more, in traditional DC power supply under the condition of low temperature coating, when the coating thickness at 0.3 microns, deposition rate and reflectivity, film become very difficult. And the thin film surface became meng. Arc plating another deficiency is more, because the metal is molten after evaporation, so deposited particles is bigger, low density, poor wear resistance than magnetron sputtering film.
Visible, more arc deposition and magnetron sputtering coating each have advantages and disadvantages, as far as possible in order to play their respective advantages, realize the complementary, will more arc technology and magnetic control technology becomes one of the coating machine arises at the historic moment. Appeared more arc plating on craft firstly, and then using the method of magnetron sputtering coating thickening, final reuse arc plating to achieve more stable new method for the surface of the coating color.
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