2016年12月29日星期四

PVD coating vacuum coating machine leak detection techniques

PVD coating vacuum coating machine leak detection techniques
I believe colleagues for PVD coating vacuum coating machine has its own method of leak detection, how to PVD coating vacuum coating machine leak detection study, see the following representation:
First of all for being manufacturing process PVD coating container or device, the best bubble leak detection method using PVD coating. PVD coating bubble leak detection method was seized after ...pieces in a certain pressure is shown filled with gas into liquid leakage, PVD coating gas through the drain hole into the surrounding liquid to form bubbles, bubble formation PVD coating where the leak is located position, based on the rate of bubble formation, the size of the bubble, and the physical nature of the liquid gas D, PVD coating can roughly estimate the leak leak rate.
PVD coating cover method: PVD coated with a vinyl bag (cover) to cover up the entire device,
PVD coating and then helium filled bag, which is the whole vacuum vessel dip method in helium leak detection. PVD coating pressure rise method, after adequate ventilation, turn off the main valve, roughing valve and drain valve, with the changes in the BA ionization vacuum gauge measuring the pressure rise method to determine the presence or absence of a leak.
PVD coating is part of the pressure rise and materials leak resulting deflation pressures arising from rising sum of its parts, is now proportional to the time the final straight up. When PVD coating curves presented above in this state, indicating that the unit leak. PVD coating material does not leak just deflated, the curve should exhibit saturation; deflated only when there is no material leakage, the start time is proportional to a straight line.

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