Vacuum coating machine for vacuum coating equipment film uniformity concept

Vacuum coating machine for vacuum coating equipment film uniformity concept

1. The vacuum coating machine for vacuum coating equipment on the thickness uniformity, can also be interpreted as roughness, watching it on the scale of the optical thin film (that is 1/10 of a wavelength as a unit, is about 100 a), vacuum coating uniformity is good, easy to control the roughness 1/10 of the visible light wavelength range, that is for the optical properties of thin film, vacuum coating without any obstacles. But if it is refers to the uniformity of atomic scale layer, that is to achieve 10 a 1 a smooth, even under the specific control factors according to different coating gives a detailed explanation.
2. The vacuum coating machine for vacuum coating equipment the uniformity on the chemical composition, that is to say in the film, compound of atomic group branch as a result of the scale is too small and it is easy to produce uneven characteristics of SiTiO3 film, if the coating process is not scientific, so on the surface of the component is not actual SiTiO3, and may be in proportion to the other, the plating film is not want the chemical composition of the membrane, it is also the technical content of vacuum coating. The specific factors are given below.
3. Vacuum coating machine for vacuum coating equipment the uniformity of the lattice degree of order: this determines the film is a single crystal, polycrystalline, amorphous, and is the hot issue in vacuum coating technology, specific see below.
Vacuum coating machine for vacuum coating equipment classification, there are two main categories: evaporation deposition coating and sputtering deposition coating, specific include many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, sol gel method and so on.
For evaporation coating: general is heating the surface of target components in the form of groups of atoms, or ions by evaporation.