2016年10月13日星期四

Vacuum coating equipment of environmental requirements

Vacuum coating equipment of environmental requirements
Due to the vacuum coating equipment to work under vacuum condition, so the equipment to meet the requirements of the vacuum to the environment. Wu industry standards for all kinds of vacuum coating equipment general technical requirements (including the vacuum coating equipment, vacuum ion coating equipment, vacuum sputtering coating equipment, vacuum evaporating &coating equipment) to the environmental requirements specified. Only meet the requirements of the vacuum coating equipment to the environment, time can make the equipment normal operation, with the correct coating process, can produce qualified coating products.
Vacuum to the environment request, generally includes the vacuum equipment in laboratory (or workshop) temperature, the particles in the air and the surrounding environment, and for parts or in a vacuum or vacuum surface requires two aspects. These two aspects are closely linked. The environment is good or bad directly affect the normal use of vacuum equipment; And vacuum equipment whether to clean the inside of the vacuum chamber or load parts, and directly affects the performance of the equipment. If the air contains a lot of water vapor and dust, in the case of a vacuum chamber without cleaning with oil seal mechanical pump suction, it is difficult to achieve the desired vacuum. No, should not be mechanical pump oil seal type ejector on metal corrosive, the reaction of vacuum oil to gas containing dust particles. Water vapor for the non-condensable gas, when a large number of ejector can non-condensable gas, the pump oil pollution has become more serious, the result, dropping the limits of the vacuum pump damaged the pump suction performance.
Of the dust in industry environment is the powder body, the eye to distinguish the untitled, dust. Is a collection of powder or solid particles or powder body disperse state of matter. So-called refers to a collection of tiny solid particles, powder and granule refers to a count of a small matter. The smoke body in floating state is the tiny particles of solid or liquid material that exists in the gas system. Matter whether solid or liquid, who went into a state of particles can be collectively referred to as dust particles. To dust particles diameter to determine the size of the air cleanliness standards, to customize the level of clean room. There is a requirement for clean is not only suitable for the industrial sector, is suitable for vacuum requirement for clean environment.

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