Vacuum magnetron sputtering coating machine

Vacuum magnetron sputtering coating machine

Vacuum magnetron sputtering coating machine are widely used in household appliances, clocks, lamps, crafts, toys, light reflectors, cell phone buttons shell and instruments and meters, plastic, glass, ceramic, tile and other decorative coating surface and the function of the mould coating. The so-called "splash" can be in the charge particle bombardment objects (usually use gas positive ions), causing surface atoms to escape from the mother's phenomenon, magnetron sputtering target using static electromagnetic field, the magnetic field for the curved shape, uniform electric field and the logarithmic electric field respectively used for planar target and coaxial cylindrical target. Electronic under the effect of electric field, the speed to fly to the substrate and argon atoms collide in the process, if the electron has enough energy (about 30 ev), the ionization Ar + and produce electronic, electronic flew to substrate, Ar + under the effect of electric field, the speed to fly to the cathode (sputtering target) and the high-energy bombarding target surface, make the sputtering target material.
The company of magnetron sputtering equipment has the following several characteristics: 1, the film thickness controllability and repeatability is good, can reliable plating system for the thickness of the film, and sputtering coating thickness can be obtained on the surface of the larger uniform film layer; 2, thin film and substrate adhesion, and part of the high-energy phenomena of sputtering atom to produce different degree of injection, the substrate to form a layer of sputtering and substrate atoms mutual amalgamation of the pseudo diffusion layer; 3, the preparation of special materials can film, can the membrane layer can use different material preparation hybrid film, compound film sputtering at the same time, also can splash into TiN, imitation gold film; 4, membrane layer, high purity sputtering film do not mix in the crucible heater material composition.